X-ray generating apparatus, method of adjusting target, and method of using x-ray generating apparatus
AssigneeCanon Anelva Corporation
InventorYoichi ANDO
Life of this patent
Estimating the term…
Abstract
An X-ray generating apparatus includes an electron gun, a target configured to generate X-rays by being irradiated with an electron beam emitted from the electron gun, and a controller configured to control a first mode for thinning the target by irradiating the target with an electron beam with a current adjusted within a first current range and a second mode for generating X-rays by irradiating the target with an electron beam with a current adjusted within a second current range. The first current range has a lower limit larger than an upper limit of the second current range.
Claims15
An X-ray generating apparatus including an electron gun and a target configured to generate X-rays by being irradiated with an electron beam emitted from the electron gun, the apparatus comprising:
- a controller configured to control a first mode for thinning the target by irradiating the target with an electron beam with a current adjusted within a first current range and a second mode for generating X-rays by irradiating the target with an electron beam with a current adjusted within a second current range,
- wherein the first current range has a lower limit larger than an upper limit of the second current range.
An adjustment method of adjusting a thickness of a target in an X-ray generating apparatus including an electron gun and the target configured to generate X-rays by being irradiated with an electron beam emitted from the electron gun, the adjustment method comprising:
- a thinning step of thinning the target by irradiating the target with an electron beam with a current adjusted within a first current range;
- and
- a detecting step of detecting X-rays generated by irradiating the target with an electron beam with a current adjusted within a second current range,
- wherein the first current range has a lower limit larger than an upper limit of the second current range.
A method of using an X-ray generating apparatus including an electron gun and a target configured to generate X-rays by being irradiated with an electron beam emitted from the electron gun, the method comprising:
- a thinning step of thinning the target by irradiating the target with an electron beam with a current adjusted within a first current range;
- and
- a generating step of generating X-rays by irradiating the target with an electron beam with a current adjusted within a second current range,
- wherein the first current range has a lower limit larger than an upper limit of the second current range.
Dependencies are inferred from the claim text.