Inertial sensor and inertial measurement unit

Abstract

An inertial sensor includes: a base body; a sensor element provided at the base body; and a lid body covering the sensor element. The sensor element includes a anchor fixed to the base body, a movable body swingable about a first axis, which is horizontal to the base body, as a swing axis, a first rotation spring and a second rotation spring coupling the anchor and the movable body, a movable comb electrode group provided at the movable body, a fixed comb electrode group provided at the base body and facing the movable comb electrode group, a first inspection electrode provided at the movable body, and a second inspection electrode provided at the base body or the lid body and overlapping the first inspection electrode in a plan view. In the plan view, the first inspection electrode is provided with a plurality of damping adjustment holes.

Dependencies are inferred from the claim text.