Octafluorocyclobutane purification method

Abstract

Provided is an octafluorocyclobutane purification method capable of removing contained fluorocarbons to yield a highly pure octafluorocyclobutane. The octafluorocyclobutane purification method includes a decomposition step of mixing a crude octafluorocyclobutane containing octafluorocyclobutane and fluorocarbons as impurities with oxygen gas or air to give a mixed gas containing the oxygen gas or air at a concentration of 1% by volume or more and 90% by volume or less and bringing the mixed gas into contact with an impurity decomposing agent containing alumina and an alkaline earth metal compound and to decompose fluorocarbons, at a temperature of 100° C. or more and 500° C. or less to decompose the fluorocarbons and a concentration step of removing, from the mixed gas in which the fluorocarbons have been decomposed in the decomposition step, the gas containing oxygen gas or air (except octafluorocyclobutane) to increase the concentration of the octafluorocyclobutane.

Dependencies are inferred from the claim text.