Flexible-piezoelectric sensors made with thin ribbon ceramics and transition metal dichalcogenides

Abstract

Embodiments of a sensor are disclosed herein. The sensor includes a ceramic substrate having a first major surface, a second major surface opposite to the first major surface, and a thickness measured from the first major surface to the second major surface. The thickness is from 10 μm to 200 μm. A piezoelectric layer is disposed on the first major surface of the ceramic substrate, and the piezoelectric layer has a thickness of 10 μm or less. At least one electrical contact is disposed on the piezoelectric layer or between the ceramic substrate and the piezoelectric layer or both on the piezoelectric layer and between the ceramic substrate and the piezoelectric layer. A wearable device including such a sensor is also disclosed herein as well as a method of manufacturing same.

Dependencies are inferred from the claim text.