Silica member and led device
AssigneeCoorsTek, Inc.
InventorsShintaro MIYAMOTO, Ramesh VALLEPU, Hiroaki KOBAYASHI, Yu YOKOYAMA
Life of this patent
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Abstract
The present invention relates to a silica member characterized in that the silica member is equipped with a body section comprising a silica glass, the body section is equipped with an other member joining section for another member, the other member joining section is provided with, in order from the body section side, an underlayer, an intermediate layer, and a surface layer formed from Au, the porosity of the underlayer is within the range of 5-10%, the porosity of the intermediate layer is within the range of 4-5%, the thickness of the underlayer is within the range of 20-100 nm, and the thickness of the intermediate layer is within the range of 100-200 nm.
Claims8
A silica member comprising a main body comprising silica glass,
- wherein the main body has an other member-joining portion for joining to another member,
- wherein the other member-joining portion has a base layer, an intermediate layer, and a surface layer comprising Au that are formed on the other member-joining portion in this order from the main body, and
- wherein the base layer has a porosity of higher than or equal to 5% and lower than or equal to 10%, the intermediate layer has a porosity of higher than or equal to 4% and lower than or equal to 5%, the base layer has a thickness of larger than or equal to 20 nm and smaller than or equal to 100 nm, and the intermediate layer has a thickness of larger than or equal to 100 nm and smaller than or equal to 200 nm.
Dependencies are inferred from the claim text.