Treatment condition setting method, storage medium, and substrate treatment system

A computer-readable storage medium storing a program running on a computer of a controller configured to control a substrate treatment system so as to cause the substrate treatment system to execute a treatment condition setting method of setting a treatment condition of a predetermined treatment in the substrate treatment system, the substrate treatment system comprising a plurality of treatment apparatuses each configured to perform the predetermined treatment on a substrate,

• the substrate treatment system comprising an imaging apparatus configured to image a surface side of the substrate,
• the treatment condition setting method comprising:
• imaging, by the imaging apparatus, a reference substrate being a substrate which is a reference for setting the treatment condition and acquiring a captured image of the reference substrate based on an imaging result;
• imaging, by the imaging apparatus, a treated substrate being a substrate on which the predetermined treatment has been performed under a current treatment condition and acquiring a captured image of the treated substrate based on an imaging result;
• calculating a deviation amount in color information between the captured image of the treated substrate and the captured image of the reference substrate;
• calculating a correction amount of the treatment condition of the predetermined treatment based on a correlation model indicating a correlation between a change amount in the color information in the captured image of the substrate based on the imaging result by the imaging apparatus and a change amount in the treatment condition and on the deviation amount in the color information;
• and
• setting the treatment condition of the predetermined treatment based on the calculated correction amount and on the current treatment condition,
• wherein the acquiring a captured image of the treated substrate, the calculating a deviation amount, the calculating a correction amount, and the setting are performed for each of the treatment apparatuses.

A substrate treatment system comprising a plurality of treatment apparatuses each configured to perform a predetermined treatment on a substrate, the substrate treatment system comprising:

• an imaging apparatus configured to image a surface side of the substrate;
• and
• a controller configured to set a treatment condition of the predetermined treatment,
• the controller performing a control to execute:
• imaging, by the imaging apparatus, a reference substrate being a substrate which is a reference for setting the treatment condition and acquiring a captured image of the reference substrate based on an imaging result;
• imaging, by the imaging apparatus, a treated substrate being a substrate on which the predetermined treatment has been performed under a current treatment condition and acquiring a captured image of the treated substrate based on an imaging result;
• calculating a deviation amount in color information between the captured image of the treated substrate and the captured image of the reference substrate;
• calculating a correction amount of the treatment condition of the predetermined treatment based on a correlation model indicating a correlation between a change amount in the color information in the captured image of the substrate based on the imaging result by the imaging apparatus and a change amount in the treatment condition and on the deviation amount in the color information;
• and
• setting the treatment condition of the predetermined treatment based on the calculated correction amount and on the current treatment condition,
• wherein the acquiring a captured image of the treated substrate, the calculating a deviation amount, the calculating a correction amount, and the setting are performed for each of the treatment apparatuses.