Hollow-core fiber based broadband radiation generator with extended fiber lifetime
AssigneeASML Netherlands B.V.
InventorsAmir ABDOLVAND, Cristian Bogdan CRAUS, Anna EZERSKAIA, Phani Kumar DOMALAPALLY
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Abstract
An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.
Claims21
-20. (canceled)
A source device configured to generate a broadband radiation output upon receipt of pump radiation, the broadband radiation source comprising:
- an optical component, comprising:
- a hollow-core photonic crystal fiber (HC-PCF), and
- a gas mixture filling the HC-PCF, wherein the gas mixture comprises a mixture of at least one first gas configured for the generation of broadband radiation and at least one second gas configured to improve thermal conductivity of the gas mixture and/or provide acoustic damping of shock waves initiated during the generation of broadband radiation;
- and
- a pump radiation source configured to generate the pump radiation,
- wherein an optimal acoustic damping frequency of the gas mixture is substantially matched to a repetition rate of the pump radiation generated by the pump radiation source.
A method for configuring a source arrangement configured to generate a broadband radiation output and comprising a pump radiation source configured to output pump radiation, a hollow-core photonic crystal fiber (HC-PCF), and a gas medium filling the HC-PCF, the method comprising substantially matching an optimal acoustic damping frequency of the gas medium to a repetition rate of the pump radiation generated by the pump radiation source.
A method for configuring a source arrangement configured to generate a broadband radiation output and comprising a pump radiation source configured to output pump radiation, a hollow-core photonic crystal fiber (HC-PCF), and a gas medium filling the HC-PCF, the method comprising optimizing the repetition rate of the pump radiation such that it is unmatched to any acoustic resonance frequencies of an inner cladding structure of the HC-PCF.
Dependencies are inferred from the claim text.