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US 2023/0333064 A1Published application
Control method, inspection system, and storage medium
AssigneeKabushiki Kaisha Toshiba
InventorsToshiyuki ONO, Atsushi MATSUMURA
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Abstract
According to one embodiment, a control method includes setting a transmission angle of an ultrasonic wave to a standard angle. The control method further includes transmitting an ultrasonic wave at the set transmission angle and detecting an intensity of a reflected wave from an object. The control method further includes calculating a tilt angle based on a gradient of the intensity. The tilt angle indicates a tilt of the object. The control method further includes resetting the transmission angle based on the tilt angle.
Claims2
A control method, comprising:
- setting a transmission angle of an ultrasonic wave to a standard angle;
- transmitting an ultrasonic wave at the set transmission angle and detecting an intensity of a reflected wave from an object;
- calculating a tilt angle based on a gradient of the intensity, the tilt angle indicating a tilt of the object;
- and
- resetting the transmission angle based on the tilt angle.
2 more elements
2-10. (canceled)
Dependencies are inferred from the claim text.