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US 2023/0326728 A1Published application
Micro-lens array for metal-channel photomultiplier tube
AssigneeKLA Corporation
InventorsPaul Donders, Derek Mackay
Life of this patent
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Abstract
The effective quantum efficiency of a metal-channel photomultiplier tube can be increased with an optical system. The optical system can direct incident light from areas of low efficiency on the cathode of the metal-channel photomultiplier tube instead to areas of high efficiency on the cathode. These high-efficiency areas of the cathode can correspond to a position between the dynode structure.
Claims15
A system comprising:
- a metal-channel photomultiplier tube, wherein a cathode of the metal-channel photomultiplier tube has high-efficiency areas and low-efficiency areas;
- and
- an optical system positioned in a path of a beam of light directed at the metal-channel photomultiplier tube, wherein the optical system is configured to direct most of the beam of light at the high-efficiency areas of the metal-channel photomultiplier tube.
A method comprising:
- generating a beam of light;
- directing the beam of light toward an optical system;
- and
- directing the beam of light onto a plurality of areas of a metal-channel photomultiplier tube with the optical system, wherein the areas correspond to high-efficiency areas of a cathode of the metal-channel photomultiplier tube.
1 more element
Dependencies are inferred from the claim text.