Guide device, coolant duct and diffusion vacuum pump
OwnerSascha Georg Werker, Hans-Werner Schweizer +1inventors
InventorsSascha Georg Werker, Hans-Werner Schweizer, Tobias Graf
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Abstract
A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.
Claims16
A guide device for a diffusion vacuum pump having
- a plurality of annular guide plates, the guide plates being arranged radially,
- wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point,
- wherein the first section extends axially in a first direction, the second section extending axially in the opposite second direction,
- wherein the first section is designed to taper radially and/or wherein the second section is designed to taper radially.
A coolant duct for a vacuum pump, in particular a diffusion pump, with a flange, the flange having a recess with a first diameter, wherein a coolant line is arranged in the recess, the coolant line having a second diameter, the second diameter being smaller than the first diameter so that the coolant line is guided in the recess without contact.
Dependencies are inferred from the claim text.