Quartz glass substrate with improved adhesion of thermal spray coating, its manufacturing method, and method for manufacturing quartz glass parts covered with thermal spray coating
AssigneeTechno Quartz Inc.
InventorsMasahide KATO, Yasuhiro UMETSU, Yo MATSUURA
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Abstract
A method for manufacturing a quartz glass substrate with a coating formed includes: surface roughening for a base surface of the quartz glass substrate, on which the sprayed coating is formed; and a heating treatment of heating the substrate after the surface roughening. The base surface is 0.9 μm or more and 5.0 μm or less in arithmetic mean roughness (Ra) in the surface roughening. The heating treatment is performed at a temperature that is equal to or higher than a strain point (temperature at which the viscosity reaches 1013.5 Pa·sec) of the quartz glass.
Claims5
A method for manufacturing a quartz glass substrate with a sprayed coating formed, the method comprising:
- surface roughening for a base surface of the quartz glass substrate, on which the sprayed coating is formed;
- and
- a heating treatment of heating the substrate after the surface roughening,
- wherein the base surface is 0.9 μm or more and 5.0 μm or less in arithmetic mean roughness (Ra) in the surface roughening, and
- the heating treatment is performed at a temperature that is equal to or higher than a strain point of the quartz glass, and equal to or lower than a annealing point of the quartz glass.
A quartz glass part with a sprayed coating of a metal or a ceramic formed on a quartz glass substrate,
- a base surface of the quartz glass substrate with the sprayed coating formed is 0.9 μm or more and 5.0 μm or less in arithmetic mean roughness (Ra),
- a microcrack at the base surface is 18 μm or less in depth, and
- the sprayed coating is 300 μm or more in film thickness, and 20% or less in porosity.
Dependencies are inferred from the claim text.