Micromagnetic device and method of forming the same
AssigneeEnaChip inc.
InventorsTrifon Liakopoulos, Amrit Panda
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Abstract
A micromagnetic device and method of forming the same. In one embodiment, the micromagnetic device includes a substrate, a seed layer over the substrate and a magnetic layer over the seed layer. The magnetic layer includes a magnetic alloy including iron, cobalt, boron and phosphorous, wherein a content of the cobalt is in a range of 1.0 to 8.0 atomic percent, a content of the boron is in a range of 0.5 to 10 atomic percent, a content of the phosphorus is in a range of 3.5 to 25 atomic percent, and a content of the iron is substantially a remaining proportion of the magnetic alloy.
Claims21
A micromagnetic device, comprising:
- a substrate;
- a seed layer over said substrate;
- and
- a magnetic layer over said seed layer comprising a magnetic alloy including iron, cobalt, boron and phosphorous, wherein a content of said cobalt is in a range of 1.0 to 8.0 atomic percent, a content of said boron is in a range of 0.5 to 10 atomic percent, a content of said phosphorus is in a range of 3.5 to 25 atomic percent, and a content of the iron is substantially a remaining proportion of said magnetic alloy.
A method of forming a micromagnetic device, comprising:
- providing a substrate;
- forming a seed layer over said substrate;
- and
- forming a magnetic layer over said seed layer from a magnetic alloy including iron, cobalt, boron and phosphorous, wherein a content of said cobalt is in a range of 1.0 to 8.0 atomic percent, a content of said boron is in a range of 0.5 to 10 atomic percent, a content of said phosphorus is in a range of 3.5 to 25 atomic percent, and a content of the iron is substantially a remaining proportion of said magnetic alloy.
21-72. (canceled)
Dependencies are inferred from the claim text.