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US 2023/0305045 A1Published application
System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber
AssigneeImpedans Ltd
InventorsDavid GAHAN, Paul SCULLIN
Life of this patent
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Abstract
A system for non-invasive sensing of radio-frequency current spectra. In one example, the system comprises a plasma processing chamber, a plasma generator, and a shunt connector having a resistor therein. In one example, the shunt connector is attached across an opening in a ground-return path between the chamber and the generator.
Claims17
A system for non-Invasive sensing of radio-frequency current spectra comprising:
- a plasma processing chamber;
- a plasma generator;
- and
- a shunt connector having a resistor therein;
- wherein the shunt connector is attached across an opening in a ground-return path between the chamber and the generator.
2 more elements
A method for non-Invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber comprising:
- providing a shunt connector having a resistor therein;
- and
- attaching the shunt connector across an opening in a ground-return path between the chamber and a plasma generator.
Dependencies are inferred from the claim text.