Particle collecting device having a cleaning unit, and cleaning method for a particle collecting device
AssigneeCleancontrolling GmbH
InventorVolker Burger
Life of this patent
Estimating the term…
Abstract
A particle collecting device for collecting particles from surfaces for a particle analysis within the context of testing the technical cleanliness of test bodies, in particular work pieces and machines, with a cleaning unit.
Claims20
A particle collecting device (1) for collecting particles from surfaces for a particle analysis when testing the technical cleanliness of test objects in a suction mode of the particle collecting device (1), the particle collecting device (1) comprising:
- a suction line (12) configured for aspirating a particle/air mixture from a surface to be tested;
- and
- a particle collection unit (120) configured to filter out aspirated particles of the particle/air mixture before it reaches a vacuum source (8),
- wherein
- the particle collecting device (1) comprises a cleaning unit (101) configured in such a manner that the particle collecting device (1) can be rinsed in a rinsing mode of the particle collecting device (1) by aspirating a cleaning liquid, in order to flush out particles accumulated during suction mode.
A cleaning method for cleaning a particle collecting device (1) for collecting particles from surfaces for a particle analysis when testing the technical cleanliness of test objects, in particular work pieces, machines and/or printed circuit boards, the cleaning method comprising the following steps:
- bringing a cleaning unit (101) into operative contact with the particle collecting device (1);
- rinsing a suction line (12) and a particle collection unit (120) with the cleaning liquid in a rinsing mode.
Dependencies are inferred from the claim text.