Diaphragm pressure gauge and compound pressure gauge
AssigneeVacuum Products Corporation
InventorHisao HOJOH
Life of this patent
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Abstract
A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.
Claims10
A diaphragm pressure gauge, comprising:
- a structure disposed under pressure to be measured;
- two diaphragms attached to the structure so as to oppose each other;
- and
- a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms, wherein
- in each of the two diaphragms, when one of two surfaces is designated an opposing surface and another surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.
Dependencies are inferred from the claim text.