Ultra-flat and low-friction metallic glass film and a method for preparing the same
AssigneeCity University of Hong Kong
InventorsJian LU, Jialun GU, Yan BAO
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Abstract
An ultraflat and ultralow-friction metallic glass thin film is fabricated. The metallic glass thin film is a binary alloy, wherein a content of one metal element of the binary alloy is between 45 atomic % and 64 atomic %. The metallic glass thin film has an atomically smooth surface with a surface roughness Ra less than 0.1 nm and a total height of profile Rt less than 0.15 nm; the friction coefficient is below 1×10−2. Due to the metallic glass thin film being treated by ion bombardment, the metallic glass thin film is thermally ultrastable.
Claims14
An ultraflat and ultralow-friction metallic glass thin film, the metallic glass thin film being a binary alloy, wherein a content of one metal element of the binary alloy is between 45 atomic % and 64 atomic %, the metallic glass thin film having an atomically smooth surface with a surface roughness Ra less than 0.1 nm and a total height of profile Rt less than 0.15 nm and a friction coefficient below 1×10−2, the metallic glass thin film being treated by ion bombardment such that it is thermally ultrastable.
Dependencies are inferred from the claim text.