Joined body, holding device, and electrostatic chuck
AssigneeNgk Spark Plug Co., Ltd.
InventorsOsamu YOSHIMOTO, Ryuichi ARAKAWA, Tomoo TANAKA
Life of this patent
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Abstract
A joined body includes a first member and a second member which are joined together via a joining portion including a metal layer having a plurality of pores communicating with each other. The first member and the metal layer have respective through holes formed in the first member and the metal layer, respectively, and communicating with each other. A tubular member is disposed between an inner side portion of the through hole formed in the metal layer and an interior portion of the metal layer.
Claims20
A joined body in which a first member and a second member are joined together via a joining portion including a metal layer having a plurality of pores communicating with each other, wherein
- the first member and the metal layer have respective through holes formed in the first member and the metal layer, respectively, and communicating with each other, and
- a tubular member is disposed between an inner side portion of the through hole formed in the metal layer and an interior portion of the metal layer.
Dependencies are inferred from the claim text.