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AssigneeGatan, Inc.
InventorJohannes ÖSTERREICHER
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A computer-assisted method for determining an element fraction of a determination element, in particular with a small atomic number, especially lithium, of an examination region of a sample bombarded with primary electrons, wherein a backscattered electron signal, preferably a backscattered electron image, captured using a backscattered electron detector and a spectroscopy element composition of the examination region determined using an X-ray spectroscopy detector, such as an EDX detector, are obtained. A practicable quantitative determination can be achieved if a measured gray value SM determined from the backscattered electron signal is combined with element fractions of the spectroscopy element composition in order to determine a fraction of the determination element. A device for processing data and to a computer product for carrying out the method is also disclosed.
A computer-assisted method for determining an element fraction of a determination element, in particular with a small atomic number, especially lithium, of an examination region of a sample bombarded with primary electrons, wherein a backscattered electron signal, preferably a backscattered electron image, captured using a backscattered electron detector, and a spectroscopy element composition of the examination region determined using an X-ray spectroscopy detector, such as an EDX detector, are obtained, wherein a measured gray value SM determined from the backscattered electron signal is combined with element fractions of the spectroscopy element composition in order to determine a fraction of the determination element, and wherein a reference gray value SV is calculated using the element fractions of the spectroscopy element composition and a fraction of the determination element is determined using a comparison, in particular a difference, of the measured gray value SM and reference gray value SV.
(canceled)
Dependencies are inferred from the claim text.