System and method for separating volumetric and surface scattering of optical component

Abstract

A system includes a light source configured to emit a probing beam to illuminate an optical element, and a rotating structure to which the optical element is mounted. The system also includes a controller configured to control the rotating structure to rotate to change a tilt angle of the optical element with respect to a propagation direction of the probing beam. The system also includes an image sensor configured to receive one or more scattered beams output from the optical element illuminated by the probing beam, and generate a plurality of sets of speckle pattern image data when the optical element is arranged at a plurality of tilt angles within a predetermined tilting range. The controller is configured to process the plurality of sets of speckle pattern image data to determine respective weights of volumetric scattering and surface scattering in an overall scattering of the optical element.

Dependencies are inferred from the claim text.