Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation

A method for directing an output of a remote plasma source operation through a valve body of an isolation valve assembly, the method comprising:

• securing an outlet of the remote plasma source to an inlet of the valve body of the isolation valve assembly that includes a rotatable sealing body disposed within an interior cavity of the valve body;
• rotating the sealing body within the interior cavity of the valve body to achieve an open position in which a first opening of a channel of the sealing body is substantially aligned with the inlet of the valve body and a second opening of the channel of the sealing body is substantially aligned with an outlet of the valve body;
• providing the output of the remote plasma source operation to the inlet of the valve body via the outlet of the remote plasma source;
• directing, in the open position, the output from the inlet of the valve body to the channel disposed in the sealing body;
• and
• evacuating the output of the remote plasma source operation from the channel of the sealing body via the outlet of the valve body.