Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
AssigneeIchor Systems, Inc.
InventorsStephen CARSON, Randolph Treur
Life of this patent
Estimating the term…
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.
Claims20
A seal retainer for retaining a seal, the seal retainer comprising:
- a sheet body, the sheet body comprising:
- a first axis;
- a second axis perpendicular to the first axis;
- a first portion, the first axis coplanar with the first portion, the first portion elongate in a direction of the first axis and extending from the second axis along the first axis;
- a second portion, the second portion extending along the second axis and having a seal retaining feature.
A fluid flow component assembly, the fluid flow component assembly comprising:
- a fluid flow component comprising a first seal cavity;
- an alignment feature in contact with the fluid flow component;
- a first seal configured to engage the first seal cavity;
- a first seal retainer configured to engage the first seal and the alignment feature of the fluid flow component;
- wherein the first seal is assembled to the first seal retainer, the first seal in contact with the first seal cavity.
A seal retainer for retaining a seal, the seal retainer comprising:
- a sheet body, the sheet body comprising:
- a first portion extending along a first axis, the first portion being elongate in a direction of the first axis and extending from the second axis;
- a second portion extending along a second axis, the second axis being perpendicular to the first axis, the second portion extending along the second axis;
- and
- a seal retaining feature formed into the second portion.
Dependencies are inferred from the claim text.