Micro-electro-mechanical system (mems) devices and fabrication methods thereof
AssigneeVanguard International Semiconductor Corporation
InventorsRAKESH CHAND, Sock Kuan Soo, MUNIANDY SHUNMUGAM, RAMACHANDRAMURTHY PRADEEP YELEHANKA
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Abstract
A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.
Claims20
A micro-electro-mechanical system (MEMS) device, comprising:
- a supporting substrate;
- a cavity disposed in the supporting substrate;
- a stopper disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper being in contact with the cavity, wherein the stopper comprises:
- a filling material surrounding a periphery of the cavity;
- and
- a liner wrapping around the filling material;
- and
- a MEMS structure disposed over the cavity and attached on the stopper and the supporting substrate.
A method of fabricating a micro-electro-mechanical system (MEMS) device, comprising:
- providing a supporting substrate;
- etching the supporting substrate to form a trench, where the trench surrounds a portion of the supporting substrate;
- forming a liner in the trench;
- filling up the trench with a filling material to form a stopper, wherein the stopper comprises the liner and the filling material;
- forming a MEMS structure on the stopper and the supporting substrate, wherein the MEMS structure includes a through hole;
- and
- etching a portion of the supporting substrate to form a cavity by providing an etchant through the through hole, wherein the stopper is in contact with the cavity.
Dependencies are inferred from the claim text.