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US 2023/0291380 A1Published application
Lateral field excitation acoustic resonator
AssigneeQorvo US, Inc.
InventorsMarc Solal, Robert Aigner
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Abstract
Lateral field excitation acoustic resonators and methods of manufacture are disclosed. In one aspect, an acoustically resonating material such as a piezoelectric film or membrane is spaced from a substrate by electrodes having an air gap therebetween. When current flows through the electrodes, lateral field acoustic waves are excited in the resonating material with relatively good coupling and adequate heat dissipation.
Claims20
A resonator comprising a piezoelectric membrane for which excitation is done using electrodes at alternate polarities such that:
- the electrodes are placed between the piezoelectric membrane and a substrate.
A resonator comprising:
- a substrate;
- a reflector positioned on a surface of the substrate;
- electrodes mounted on the reflector;
- and
- a piezoelectric membrane for which excitation is done using the electrodes at alternate polarities.
2 more elements
Dependencies are inferred from the claim text.