Gas purifying filter and substrate treatment apparatus including the same

A substrate treatment apparatus comprising:

• a working region accommodating a spinner and a scanner;
• a lower plenum chamber disposed below the working region and accommodating exhaust gas discharged from the spinner;
• and
• an air control cabinet disposed in the lower plenum chamber below the scanner and including a first filter,
• wherein the first filter comprises:
• a first gas permeable body having a gas inlet surface;
• a first adsorption layer disposed on the first gas permeable body and including activated carbon on which a phosphoric acid-based compound satisfying the following Formula 1 is supported;
• a second adsorption layer disposed on the first adsorption layer and including a hydrophobic zeolite having a SiO2/Al2O3 value of about 50 or more;
• and
• a second gas permeable body disposed on the second adsorption layer and having a gas outlet surface.
• where n is an integer greater than or equal to 1.