# US 2023/0267263 A1 · Space Optimization Between SRAM Cells and Standard Cells

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- Number: US 2023/0267263 A1
- Document ID: US20230267263A1
- Status: Published application
- Kind: A1
- Application number: 18/308,860
- Filed: 2023-04-28
- Published: 2023-08-24
- Earliest claimed: 2019-02-21
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Feng-Ming Chang; Ruey-Wen Chang; Ping-Wei Wang; Sheng-Hsiung Wang; Chi-Yu Lu
- Web page: https://patentgrep.com/patent/US20230267263A1

## CPC

- G06F 30/392: Floor-planning or layout, e.g. partitioning or placement
- G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36)
- H10B 10/12: {comprising a MOSFET load element}
- H10B 10/18: {Peripheral circuit regions}
- H10D 84/834: {comprising FinFETs}
- H10D 89/10: Integrated device layouts
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- H10B: ELECTRONIC MEMORY DEVICES
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A method includes laying out a standard cell region, with a rectangular space being within the standard cell region. The standard cell region includes a first row of standard cells having a first bottom boundary facing the rectangular space, and a plurality of standard cells having side boundaries facing the rectangular space. The plurality of standard cells include a bottom row of standard cells. A memory array is laid out in the rectangular space, and a second bottom boundary of the bottom row and a third bottom boundary of the memory array are aligned to a same straight line. A filler cell region is laid out in the rectangular space. The filler cell region includes a first top boundary contacting the first bottom boundary of the first row of standard cells, and a fourth bottom boundary contacting a second top boundary of the memory array.

## Claims

### Claim 1

A structure comprising:
a plurality of standard cells forming a standard cell row;
a Static Random Access Memory (SRAM) array; and
a plurality of filler cells forming a filler cell row, wherein the filler cell row is between the standard cell row and the SRAM array, wherein the plurality of filler cells have a first height equal to a second height of an SRAM cell in the SRAM array, and wherein top boundaries of the plurality of filler cells are in contact with bottom boundaries of the plurality of standard cells, and additional bottom boundaries of the plurality of filler cells are in contact with an additional top boundary of the SRAM array.

### Claim 2 (depends on 1)

The structure of claim 1, wherein the plurality of filler cells have identical layouts, and one of the plurality of filler cells has a first length equal to a second length of one of SRAM cells in the SRAM array.

### Claim 3 (depends on 1)

The structure of claim 1, wherein the plurality of filler cells are dummy cells electrically disconnected from both of the plurality of standard cells and the SRAM array.

### Claim 4 (depends on 1)

The structure of claim 1, wherein each of the plurality of filler cells comprises a semiconductor fin extending from a left boundary to a right boundary of a respective filler cell in the plurality of filler cells.

### Claim 5 (depends on 4)

The structure of claim 4, wherein the semiconductor fins in the plurality of filler cells are joined to form a continuous fin, and the continuous fin has a length equal to a total length of all SRAM cells in a row of the SRAM array.

### Claim 6 (depends on 1)

The structure of claim 1, wherein each of the plurality of filler cells comprises a plurality of semiconductor fins, and first neighboring fins closer to the plurality of standard cells have a first pitch, and second neighboring fins closer to the SRAM array have a second pitch smaller than the first pitch.

### Claim 7 (depends on 1)

The structure of claim 1, wherein each of the plurality of filler cells comprises a gate feature continuously extending from top to bottom of a respective filler cell in the plurality of filler cells.

### Claim 8 (depends on 7)

The structure of claim 7, wherein the gate feature is electrically floating.

### Claim 9 (depends on 1)

The structure of claim 1, wherein each of the plurality of filler cells comprises a discontinuous gate feature, wherein the discontinuous gate feature comprises a first gate feature and a second gate feature aligned to a same straight line and disconnected from each other, and wherein the first gate feature extends to top of a respective filler cell in the plurality of filler cells, and the second gate feature extends to bottom of the respective filler cell in the plurality of filler cells.

### Claim 10

A structure comprising:
a Static Random Access Memory (SRAM) cell having a first length and a first height;
a first filler cell having a second length equal to the first length, and a second height equal to the first height, wherein the first filler cell comprises a first plurality of semiconductor fins, each extending from a first boundary to a second boundary of the first filler cell; and
a standard cell, with the first filler cell being between the SRAM cell and the standard cell.

### Claim 11 (depends on 10)

The structure of claim 10 further comprising a second filler cell between the first filler cell and the standard cell, wherein the second filler cell comprises a second plurality of semiconductor fins, each extending from a third boundary to an opposing fourth boundary of the second filler cell.

### Claim 12 (depends on 11)

The structure of claim 11, wherein the first plurality of semiconductor fins are joined to respective ones of the second plurality of semiconductor fins to form continuous semiconductor fins.

### Claim 13 (depends on 11)

The structure of claim 11, wherein the first plurality of semiconductor fins have lengthwise directions parallel to an interface between the standard cell and the first filler cell.

### Claim 14 (depends on 10)

The structure of claim 10, wherein the first filler cell comprises a first fin group and a second fin group, with first neighboring fins in the first fin group having a same spacing as second neighboring fins in the second fin group, and wherein fin groups closer to the standard cell are spaced further apart from each other than fin groups closer to the SRAM cell.

### Claim 15 (depends on 10)

The structure of claim 10, wherein the first filler cell is physically joined to the SRAM cell and the standard cell.

### Claim 16 (depends on 10)

The structure of claim 10, wherein the first filler cell further comprises a plurality of gate features, each extending from a third boundary to a fourth boundary of the first filler cell, wherein the first boundary and the second boundary are perpendicular to the third boundary and the fourth boundary.

### Claim 17 (depends on 16)

The structure of claim 16, wherein the plurality of gate features are electrically floating.

### Claim 18

A structure comprising:
a standard cell region, with a rectangular space being located within the standard cell region, wherein the standard cell region comprises:
a top row of standard cells, wherein the top row comprises a first bottom boundary facing the rectangular space; and
a plurality of rows of standard cells separated as a first part and a second part, wherein the first part and the second part are located on opposing sides of the rectangular space, and wherein side boundaries of the first part and the second part face the rectangular space;
a memory array in the rectangular space, wherein second bottom boundaries of the first part and the second part and a third bottom boundary of the memory array are aligned to a same straight line; and
a filler cell region in the rectangular space, wherein the filler cell region comprises a plurality of filler cells forming an additional row, and wherein the filler cell region comprises:
a first top boundary contacting the first bottom boundary of the top row of standard cells; and
a fourth bottom boundary contacting a second top boundary of the memory array.

### Claim 19 (depends on 18)

The structure of claim 18, wherein the standard cell region further comprises a bottom row of standard cells, and wherein the bottom row comprises a third top boundary facing the rectangular space.

### Claim 20 (depends on 18)

The structure of claim 18, wherein the memory array is fully encircled by the standard cell region, and wherein the memory array is spaced apart from the standard cell region by the filler cell region and parts of a memory macro.