# US 2023/0264233 A1 · Liquid processing apparatus and liquid processing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2023/0264233 A1 - Document ID: US20230264233A1 - Status: Published application - Kind: A1 - Application number: 18/004,132 - Filed: 2021-06-22 - Published: 2023-08-24 - Earliest claimed: 2020-07-06 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Kazuki KOSAI; Taisei INOUE; Yusuke TAKAMATSU; Takahisa OTSUKA; Masaru AMAI; Itaru KANNO; Hiroshi YANO - Web page: https://patentgrep.com/patent/US20230264233A1 ## CPC - B08B 3/14: Removing waste, e.g. labels, from cleaning liquid - B01D 29/56: in series connection - B01D 29/60: integrally combined with devices for controlling the filtration - B01D 29/606: {by pressure measuring} - B01D 35/143: Filter condition indicators - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - B01D 2201/54: Computerised or programmable systems - B08B 3/022: {Cleaning travelling work (B08B3/042 takes precedence)} - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A liquid processing apparatus includes: a storage tank that stores a processing liquid; a first circulation line that causes the processing liquid sent from the storage tank to pass through a first filter and to return to the storage tank; and at least one second circulation line that causes the processing liquid to pass through a second filter and to return to the storage tank, wherein the second circulation line is shorter in a flow path than the first circulation line, a second flow rate of the processing liquid flowing into the second circulation line is smaller than a first flow rate of the processing liquid flowing into the first circulation line at a downstream side of a location where the first circulation line and the second circulation line are joined, and the second filter is smaller in a filtration amount per unit time than the first filter. ## Claims ### Claim at position 1 1-6. (canceled) ### Claim 7 A liquid processing apparatus comprising: a storage tank that stores a processing liquid; a first circulation line configured to cause the processing liquid sent from the storage tank to pass through a first filter and to return to the storage tank; and at least one second circulation line connected to the first circulation line and configured to cause the processing liquid to pass through a second. filter and to return to the storage tank, wherein the at least one second circulation line is shorter in a flow path than the first circulation line, a second flow rate of the processing liquid flowing into the at least one second circulation line is smaller than a first flow rate of the processing liquid flowing into the first circulation line at a downstream side of a junction location where the first circulation line and the at least one second circulation line are joined, and the second filter is smaller in a filtration amount per unit time than the first filter. ### Claim 8 (depends on 7) The liquid processing apparatus of claim 7, further comprising: an adjuster provided in the at least one second circulation line and configured to adjust the second flow rate of the processing liquid flowing into the second filter; and a control device configured to control the adjuster, wherein the control device is further configured to control the adjuster so that a first pressure of the processing liquid applied to the second filter is lower than a second pressure of the processing liquid applied to the first filter. ### Claim 9 (depends on 8) The liquid processing apparatus of claim 8, wherein the control device is further configured to increase the second flow rate of the processing liquid flowing into the at least one second circulation line with the adjuster during an initial operation rather than during a normal operation. ### Claim 10 (depends on 9) The liquid processing apparatus of claim 9, wherein the control device is further configured to issue a warning when a differential pressure between an upstream-side pressure of the processing liquid at an upstream side of the second filter and a downstream-side pressure of the processing liquid at the downstream side of the second filter is equal to or higher than a given upper limit value. ### Claim 11 (depends on 10) The liquid processing apparatus of claim 10, wherein the at least one second circulation lines includes a plurality of second circulation lines. ### Claim 12 (depends on 9) The liquid processing apparatus of claim 9, wherein the at least one second circulation lines includes a plurality of second circulation lines. ### Claim 13 (depends on 8) The liquid processing apparatus of claim 8, wherein the at least one second circulation lines includes a plurality of second circulation lines. ### Claim 14 (depends on 7) The liquid processing apparatus of claim 7, wherein the at least one second circulation lines includes a plurality of second circulation lines. ### Claim 15 A liquid processing method comprising: a first circulation operation of causing a processing liquid sent from a storage tank to pass through a first filter provided in a first circulation line and to return to the storage tank; and a second circulation operation of causing the processing liquid to pass through a second filter provided in a second circulation line connected to the first circulation line and to return to the storage tank, wherein the second circulation line is shorter in a flow path than the first circulation line, the processing liquid flowing into the second circulation line is smaller in a flow rate than the processing liquid flowing into the first circulation line at a downstream side of a junction location where the first circulation line and the second circulation line are joined, and the second filter is smaller in a filtration amount per unit time than the first filter.