Substrate processing module and substrate processing apparatus
AssigneeToho Kasei Co., Ltd.
InventorYasunori DEGUCHI
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Abstract
A substrate processing module includes a first tank and a second tank that are arranged in a first direction and in which a substrate can be arranged, a first conveyor that moves the substrate in the first direction, and a second conveyor that moves the substrate in a second direction intersecting the first direction; and a vertical conveyor that is connected to the first conveyor and vertically moves the substrate, wherein a first actuator of the first conveyor and a second actuator of the second conveyor are respectively arranged in drive spaces separated from a processing space accessible to the first tank and the second tank.
Claims13
A substrate processing module comprising:
- a first tank and a second tank that are arranged in a first direction and in which a substrate can be placed;
- a first conveyor that moves the substrate in the first direction;
- a second conveyor that moves the substrate in a second direction intersecting the first direction;
- and
- a vertical conveyor that is connected to the first conveyor and vertically moves the substrate, wherein
- a first actuator of the first conveyor and a second actuator of the second conveyor are respectively arranged in drive spaces separated from a processing space accessible to the first tank and the second tank.
Dependencies are inferred from the claim text.