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US 2023/0256478 A1Published application
Substrate processing module, substrate processing apparatus, and substrate manufacturing method
AssigneeToho Kasei Co., Ltd.
InventorYasunori DEGUCHI
Life of this patent
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Abstract
A substrate processing module includes a first tank and a second tank that are arranged in a first direction and in which a substrate can be arranged, a first conveyance unit that moves the substrate in the first direction, and a second conveyance unit that moves the substrate in a second direction intersecting the first direction.
Claims12
A substrate processing module comprising:
- a first tank and a second tank that are arranged in a first direction and in which a substrate can be placed;
- a first conveyor that moves the substrate in the first direction;
- and
- a second conveyor that moves the substrate in a second direction intersecting the first direction.
1 more element
A method of manufacturing a substrate, comprising:
- a first conveyance step of conveying a substrate in a first direction to move the substrate between a first tank and a second tank arranged in the first direction in a substrate processing module;
- and
- a second conveyance step of conveying the substrate in a second direction intersecting the first direction.
Dependencies are inferred from the claim text.