Fluid control device, fluid supply system, and fluid supply method
AssigneeFujikin Incorporated
InventorsMasahiko TAKIMOTO, Toshihide YOSHIDA, Tsutomu SHINOHARA, Kouji NISHINO
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Abstract
A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
Claims14
A fluid control device comprising:
- a valve device including an actuator for opening/closing a flow path and adjusting a flow rate of a fluid flowing through the flow path,
- a pressure sensor provided upstream of the valve device;
- and
- a control circuit connected to the valve device and the pressure sensor;
- wherein the control circuit controls an operation of the actuator based on a pressure measured by the pressure sensor and a reference pressure drop curve, in a state where an upstream side of the fluid control device is closed and the valve device is opened by using the actuator.
Dependencies are inferred from the claim text.