Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording mendium and substrate processing apparatus

A method of manufacturing a semiconductor device, comprising:

• (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer;
• (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a);
• (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer;
• and
• (d) transferring the substrates based on the substrate arrangement data.

A substrate processing apparatus comprising:

• a process chamber in which substrates are processed;
• a substrate retainer capable of accommodating the substrates;
• a transfer structure capable of loading the substrates into the substrate retainer;
• and
• a controller configured to be capable of controlling the transfer structure,
• wherein the controller is further configured to be capable of performing:
• (a) setting each of a transport parameter for determining at least an arrangement of the substrates to be loaded into the substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer;
• (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a);
• and
• (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.