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US 2023/0236509 A1Published application
A spin coating composition comprising a carbon material, a metal organic compound, and solvent, and a manufacturing method of a metal oxide film above a substrate
AssigneeMerch Patent GmbH
InventorsTakashi SEKITO, Joon Yeon CHO
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Abstract
The present invention pertains to a spin coating composition comprising a carbon material and a metal organic compound. The invention also pertains to a method of using the same to form a metal oxide film above a substrate and manufacturing a device.
Claims23
-22. (canceled)
A spin coating composition comprising a carbon material (A), a metal organic compound (B), and solvent (C), wherein
- (i) the carbon material (A) comprises unit (A1) represented by formula (A1):
- wherein:
- Ar11 is a C6-60 hydrocarbon unsubstituted or substituted by Ru,
- R12 is a C1-20 linear, branched or cyclic alkyl, amino, or alkylamino,
- R12 is I, Br or CN,
- p11 is an integer of 0-5, p12 is an integer of 0-1, q11 is an integer of 0-5, q12 is an integer of 0-1, r11 is an integer of 0-5, and s11 is an integer of 0-5, and
- provided that p11, q11 and r11 do not take 0 at the same time;
- (ii) the solvent (C) comprises an organic solvent;
- and
- (iii) a mass ratio of the carbon material (A) to the mass of the metal organic compound (B) is approximately 5 to approximately 100 mass %.
7 more elements
Dependencies are inferred from the claim text.