Heating apparatus for a semiconductor device, heating system, and semiconductor device

A semiconductor vacuum heating system, comprising:

• a vacuum apparatus;
• and
• a heating apparatus for a semiconductor device disposed in a vacuum atmosphere of the vacuum apparatus, the heating apparatus comprising:
• a carrier comprising a first abutting part;
• a heat collecting plate comprising a working surface, wherein the heat collecting plate is disposed on the carrier, and the first abutting part abuts against an edge of the heat collecting plate on a side opposite to the working surface;
• and
• a heat radiation source disposed on the side of the heat collecting plate opposite to the working surface and separated from the heat collecting plate by a predetermined distance, and configured to emit heat radiation during working and to heat the heat collecting plate in a non-contact manner, wherein the heat collecting plate receives the heat radiation and emitted heat and heats a heated object disposed on the working surface in a contact manner.

A semiconductor device, comprising:

• a semiconductor vacuum heating system, comprising:
• a vacuum apparatus;
• and
• a heating apparatus for the semiconductor device disposed in a vacuum atmosphere of the vacuum apparatus, the heating apparatus comprising:
• a carrier comprising a first abutting part;
• a heat collecting plate comprising a working surface, wherein the heat collecting plate is disposed on the carrier, and the first abutting part abuts against an edge of the heat collecting plate on a side opposite to the working surface;
• and
• a heat radiation source disposed on the side of the heat collecting plate opposite to the working surface and separated from the heat collecting plate by a predetermined distance, and configured to emit heat radiation during working and to heat the heat collecting plate in a non-contact manner, wherein the heat collecting plate receives the heat radiation and emitted heat and heats a heated object disposed on the working surface in a contact manner.