Apparatus for measuring a light beam profile
AssigneeWaveCyber Corporation
InventorsDaichi SHIRAYAMA, Mamoru AMADA, Ryuichi MORITA
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Abstract
Provided is an apparatus for measuring a light beam profile, comprising three rotary disks fixed on three positions of a rotary shaft connected to a motor at regular intervals, respectively while shifted by 120 degrees each other in a rotational direction, each rotary disk having three deformed holes with knife edges and six deformed holes defining light-passing openings and a photodetector arranged outside a set of the three rotary disks in a transmission direction of the light beam to receive the light beam passing through the three rotary disks.
Claims4
An apparatus for measuring a light beam profile, comprising:
- three rotary disks arranged at intervals on an optical path of a light beam to be measured and being integrally rotatable;
- a plurality of deformed holes formed through each of the three rotary disks and arranged on a same circumference;
- knife edges or slits defined by three deformed holes in said plurality of the deformed holes of each of the three rotary disks so as to be arranged along different directions, respectively;
- passages for the light beam defined by remaining deformed holes in said plurality of the deformed holes of each of the three rotary disks excluding the three deformed holes defining the knife edges or the slits, respectively;
- and
- a photodetector arranged on the optical path of the light beam to receive the light beam passing through the three rotary disks.
Dependencies are inferred from the claim text.