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US 2023/0219853 A1Published application
Functionally graded firing setters and process for manufacturing these setters
OwnerLucian Garrett Fergusoninventor
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Abstract
A functionally graded firing setter that includes a substrate layer of cubic oxide; a top layer of unstabilized zirconium dioxide/hafnium dioxide; and a continuous transitional gradient layer disposed between the substrate layer and the top layer. The continuous transitional gradient layer includes cubic oxide stabilized zirconium dioxide/hafnium dioxide. The cubic oxide can be calcium oxide (CaO) or magnesium oxide (MgO).
Claims20
A functionally graded firing setter comprising:
- a substrate layer consisting essentially of cubic oxide;
- a top layer consisting essentially of unstabilized zirconium dioxide, unstabilized hafnium dioxide, or a combination thereof;
- and
- a continuous transitional gradient layer disposed between the substrate layer and the top layer, wherein the continuous transitional gradient layer comprises cubic oxide stabilized zirconium dioxide, cubic oxide stabilized hafnium dioxide, or a combination thereof.
1 more element
A method for producing a functionally graded firing setter, the method comprising:
- preparing a first slurry consisting essentially of a cubic oxide;
- preparing a second slurry consisting essentially of unstabilized zirconium dioxide, unstabilized hafnium dioxide, or a combination thereof;
- depositing the first slurry over a planar carrier;
- maintaining the first slurry deposited over the planar carrier for a predetermined duration;
- after the predetermined duration, depositing the second slurry over the maintained first slurry;
- upon depositing the second slurry, drying the deposited second slurry and the maintained first slurry;
- and
- upon drying, sintering the dried second slurry and the first slurry at a predetermined temperature range to obtain the functionally graded firing setter.
5 more elements
A functionally graded firing setter prepared by a method comprising:
- preparing a first slurry consisting essentially of a cubic oxide;
- preparing a second slurry consisting essentially of unstabilized zirconium dioxide, unstabilized hafnium dioxide, or a combination thereof;
- depositing the first slurry over a planar carrier;
- maintaining the first slurry deposited over the planar carrier for a predetermined duration;
- after the predetermined duration, depositing the second slurry over the maintained first slurry;
- upon depositing the second slurry, drying the deposited second slurry and the maintained first slurry;
- and
- upon drying, sintering the dried second slurry and the first slurry at a predetermined temperature range to obtain the functionally graded firing setter.
5 more elements
Dependencies are inferred from the claim text.