Pressed silicon carbide ceramic (sic) fluidic modules with integrated heat exchange
AssigneeCorning Incorporated
InventorsAlexander Lee Cuno, Howen Lim, James Scott Sutherland
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Abstract
A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through the silicon carbide body, the interior surface having a surface roughness of less than 10 μm Ra. A process for forming such modules is also disclosed.
Claims21
A silicon carbide flow reactor fluidic module, the module comprising:
- a monolithic closed-porosity silicon carbide body;
- a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface;
- and
- one or more thermal control fluid passages also extending through the silicon carbide body;
- the interior surface having a surface roughness of less than 10 μm Ra.
(canceled)
A process for forming a silicon carbide fluidic module for a flow reactor, the process comprising:
- positioning a first layer of silicon carbide powder, the powder coated with a binder;
- positioning a first positive fluid passage mold having a tortuous shape on the first layer of silicon carbide powder;
- covering the first positive fluid passage mold with a second layer of silicon carbide powder;
- positioning a second positive fluid passage mold having a tortuous shape on the second layer of silicon carbide powder, the second positive fluid passage mold not being in contact with the first positive fluid passage mold;
- covering the second positive fluid passage mold with a third layer of silicon carbide powder;
- pressing the layers of silicon carbide powder with the molds inside to form a pressed body;
- heating the pressed body to remove the mold;
- and
- sintering the pressed body to form a monolithic silicon carbide fluidic module having a tortuous fluid passage extending therethrough one or more thermal control fluid passages also extending therethrough.
Dependencies are inferred from the claim text.