Duty cycle control to achieve uniformity
AssigneeLam Research Corporation
InventorsAlexei M. Marakhtanov, Felix Leib Kozakevich, Bing Ji, John P. Holland, Ranadeep Bhowmick
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Abstract
A method for achieving a first uniformity level in a processing rate across a surface of a substrate is described. The method includes receiving the first uniformity level to be achieved across the surface of the substrate and identifying a first plurality of duty cycles associated with a first plurality of states based on the first uniformity level. The first plurality of states are of a variable of a first radio frequency (RF) signal. The method further includes controlling an RF generator to generate the first RF signal having the first plurality of duty cycles.
Claims20
A method for achieving a first uniformity level in a processing rate across a surface of a substrate, comprising:
- receiving the first uniformity level to be achieved across the surface of the substrate;
- identifying a first plurality of duty cycles associated with a first plurality of states based on the first uniformity level, wherein the plurality of states are of a variable of a first radio frequency (RF) signal;
- and
- controlling an RF generator to generate the first RF signal having the first plurality of duty cycles.
A method for achieving a first uniformity level in a processing rate across a surface of a substrate, comprising:
- receiving the first uniformity level to be achieved across the surface of the substrate;
- identifying a plurality of duty cycles associated with a plurality of states of a variable based on the first uniformity level, wherein the plurality of states are of a plurality of radio frequency (RF) signals;
- and
- controlling a plurality of RF generators to generate the plurality of RF signals.
A controller for achieving a first uniformity level in a processing rate across a surface of a substrate, comprising:
- a processor configured to:
- receive the first uniformity level to be achieved across the surface of the substrate;
- identify a first plurality of duty cycles associated with a first plurality of states based on the first uniformity level, wherein the first plurality of states are of a variable of a first radio frequency (RF) signal;
- and
- control an RF generator to generate the first RF signal having the first plurality of duty cycles;
- and
- a memory device coupled to the processor, wherein the memory device is configured to store the first uniformity level.
Dependencies are inferred from the claim text.