Plasma resistant ceramic body formed from multiple pieces
AssigneeHeraeus Conamic North America LLC
InventorsLuke WALKER, Matthew Joseph DONELON, Sudip KOIRALA
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Abstract
Disclosed is a joined ceramic body comprising a first ceramic portion comprising a first ceramic, a second ceramic portion comprising a second ceramic, and a joining layer formed between the first ceramic portion and the second ceramic portion. The joining layer has a bond thickness of from 0.5 to 20 um and comprises silicon dioxide having a total impurity content of 20 ppm and less. A method of making the joined ceramic body and a joining material are also disclosed.
Claims54
A joined ceramic body, comprising:
- a. a first ceramic portion comprising a first ceramic;
- b. a second ceramic portion comprising a second ceramic;
- c. a joining layer formed between the first ceramic portion and the second ceramic portion, wherein the joining layer has a bond thickness of from 0.5 to 20 um and comprises silicon dioxide having a total impurity content of 20 ppm and less relative to a mass of the joining layer.
A plasma resistant composition comprising:
- a. silicon dioxide having a particle size of between 30 and 200 nm and a specific surface area as measured by BET methods of between 25 m2/g and 50 m2/g;
- b. aluminum oxide;
- and
- c. at least one rare earth oxide selected from the group consisting of Y2O3, La2O3, CeO2, Nd2O3, Pm2O3, Sm2O3, Eu2O3, Gd2O3, Tb4O7, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3 and combinations thereof;
- and
- d. a suspension medium,
- wherein the plasma resistant composition comprises a paste.
A joined ceramic body comprising:
- a. first and second ceramic portions of aluminum oxide;
- b. a joining layer formed between the first and second ceramic portions having a bond thickness of from 0.5 to 20 um,
- wherein the first and second ceramic portions have a purity of 99.99% and higher, wherein the joining layer comprises a glass ceramic comprising an amorphous glassy phase and at least one crystalline ceramic phase wherein the joining layer has a total impurity content of 20 ppm and less relative to a mass of the joining layer.
A joined ceramic body comprising:
- a. first and second ceramic portions of yttrium aluminum oxide garnet (YAG, Y3Al5O12);
- b. a joining layer formed between the first and second ceramic portions,
- wherein the first and second ceramic portions have a purity of 99.99% and higher, wherein the joining layer comprises a glass ceramic comprising an amorphous glassy phase and at least one crystalline ceramic phase wherein the joining layer has a total impurity content of 20 ppm and less relative to a mass of the joining layer and a bond thickness of from 0.5 to 20 um.
A joined ceramic body, comprising:
- a. first and second ceramic portions of aluminum oxide;
- b. a joining layer formed between the first and second ceramic portions,
- wherein the first and second ceramic portions have a purity of 99.99% and higher and the joining layer comprises a glass ceramic comprising an amorphous glassy phase and at least one crystalline ceramic phase selected from the group consisting of mullite, alumina, Y2Si2O7, Y2SiO5, and Y3Al5O12 (yttrium aluminum garnet), wherein the joining layer has a total impurity content of 20 ppm and less and a bond thickness of between 0.5 and 20 um.
A joined ceramic body comprising:
- a. first and second ceramic portions of yttrium aluminum oxide garnet (YAG, Y3Al5O12);
- b. a joining layer formed between the first and second ceramic portions, wherein the first and second ceramic portions have a purity of 99.99% and higher, wherein the joining layer comprises a glass ceramic comprising an amorphous glassy phase and at least one crystalline ceramic phase selected from the group consisting of mullite, alumina, Y2Si2O7, Y2SiO5, and Y3Al5O12 (yttrium aluminum garnet), wherein the joining layer has a total impurity content of 20 ppm and less relative to a mass of the joining layer and a bond thickness of from 0.5 to 20 um.
Dependencies are inferred from the claim text.