Pattern transfer of high viscosity material
AssigneeNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
InventorRob Jacob HENDRIKS
Life of this patent
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Abstract
It is proposed to provide a transfer method of a high viscosity functional material, such as a conductive paste, onto a receiving substrate, the method comprising the steps of: providing a plate having a cavity surface that includes at least one cavity; providing the cavity with a resistive heating device and control circuitry connected to the heating device; providing a functional material in the at least one cavity, having a material composition that, when heated by the heating device, generates a gas at an interface between the cavity surface in the cavity and the functional material, to transfer the functional material from the at least one cavity by the gas generation onto the receiving substrate.
Claims20
A transfer device for transferring of a functional material in viscous form, such as a conductive paste, onto a receiving substrate, comprising:
- a plate having a cavity surface that includes at least one cavity;
- a resistive heating device provided at the at least one cavity, and
- a control circuitry connected to the resistive heating device;
- wherein the control circuitry is arranged to, in use, operate to cause heating of the resistive heating device, so as to heat the functional material that is provided in the at least one cavity and has a composition that, when heated, generates a gas at an interface between the cavity surface in the at least one cavity and the functional material, to transfer the functional material from the at least one cavity, by the gas generated by heating the functional material, onto a receiving substrate;
- wherein the resistive device is provided as a plate parallel resistive layer, wherein the at least one cavity is formed in a thermal insulator layer of the plate,
- wherein the at least one cavity is provided with a thermal conductor that is in thermal contact with the resistive device, and
- wherein the thermal conductor extends along, and is restricted to, the cavity surface.
A transfer method of a viscous functional material, such as a conductive paste, onto a receiving substrate, the method comprising:
- providing a transfer device for transferring of a functional material in viscous form, such as a conductive paste, onto a receiving substrate, comprising:
- a plate having a cavity surface that includes at least one cavity;
- a resistive heating device provided at the at least one cavity, and
- a control circuitry connected to the resistive heating device;
- wherein the control circuitry is arranged to, in use, operate to cause heating of the resistive heating device, so as to heat the functional material that is provided in the at least one cavity and has a composition that, when heated, generates a gas at an interface between the cavity surface in the at least one cavity and the functional material, to transfer the functional material from the at least one cavity, by the gas generated by heating the functional material, onto a receiving substrate;
- wherein the resistive device is provided as a plate parallel resistive layer, wherein the at least one cavity is formed in a thermal insulator layer of the plate,
- wherein the at least one cavity is provided with a thermal conductor that is in thermal contact with the resistive device, and
- wherein the thermal conductor extends along, and is restricted to, the cavity surface;
- and
- providing the functional material in the at least one cavity, the functional material having a material composition that, when heated by the heating device, generates the gas at the interface between the cavity surface in the at least one cavity and the functional material, to transfer the functional material from the at least one cavity, by the gas generated by heating the functional material, onto the receiving substrate.
Dependencies are inferred from the claim text.