Multilayer piezoelectric substrate surface acoustic wave device with tilted multilayer interdigital transducer electrode

An acoustic wave device comprising:

• a support substrate;
• a piezoelectric layer over the support substrate;
• and
• an interdigital transducer electrode formed with the piezoelectric layer, the interdigital transducer electrode including a first layer and a second layer, the first layer being more dense than the second layer, the interdigital transducer electrode having a non-zero tilt angle and a non-zero rotation angle, the non-zero rotation angle being a negative value of the non-zero tilt angle, the acoustic wave device being configured to generate a surface acoustic wave having a wavelength L, a total number of fingers of the interdigital transducer electrode being between 50 L and 100 L, and a width between a finger of the interdigital transducer electrode and an adjacent finger of interdigital transducer electrode being between 20 L and 40 L.