Method and apparatus for usable beam current and brightness in schottky thermal field emission (tfe)
AssigneesNuFlare Technology, Inc., NuFlare Technology America, Inc.
InventorsVictor KATSAP, Chising LAI
Life of this patent
Estimating the term…
Loading patent…
AssigneesNuFlare Technology, Inc., NuFlare Technology America, Inc.
InventorsVictor KATSAP, Chising LAI
Estimating the term…
The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.
A method of determining a Schottky thermal field emission (TFE) usable current and brightness, the method comprising:
A non-transitory computer readable medium having instructions stored therein that, when executed by one or more processors, cause the one or more processors to perform a method to determine Schottky thermal field emission (TFE) usable current and brightness of a Schottky TFE source, the method comprising:
A system for determining Schottky thermal field emission (TFE) usable current and brightness of a Schottky TFE source, the system comprising:
Dependencies are inferred from the claim text.