Method and apparatus for determining gate capacitance

A method of determining a gate capacitance of a semiconductor device having a source, a drain, a gate, and a channel,

• the semiconductor device being arranged in a circuit further comprising an electrical resonator, wherein one of the source and the drain is connected to the electrical resonator, and the other of the source and the drain is connected to a high-impedance contact, the high-impedance contact being selected from a tunnel junction, a resistor having a resistance greater than or equal to 1 MQ, and a transistor in an off state;
• the method comprising:
• measuring a resonance frequency of the circuit;
• and
• calculating, based on the resonance frequency, the gate capacitance.

An apparatus for determining a gate capacitance of a semiconductor device, the semiconductor device having a having a source, a drain, a gate, and a channel;

• the apparatus comprising:
• an electrical resonator connected to one of the source and the drain of the semiconductor device;
• a high impedance contact connected to the other of the source and the drain of the semiconductor device;
• a signal generator capable of providing a probe signal to the electrical resonator;
• a sensor capable of sensing at least one of amplitude and phase of a response signal from the electrical resonator;
• a processing unit operably linked to the signal generator and the sensor;
• and
• a memory unit operably linked to the processing unit, wherein the memory unit stores computer program code, the computer program code being executable by the processing unit;
• wherein the computer program code comprises:
• a control module configured to cause the processing unit to control the signal generator;
• an identification module configured to cause the processing unit to identify, based on an input from the sensor, a resonance frequency of the electrical resonator;
• a calculation module configured to cause the processing unit to calculate, based on the resonance frequency, the gate capacitance of the semiconductor device;
• and
• an output generation module configured to generate an output identifying the gate capacitance.

A computer program product embodied on a non-transitory computer readable medium, comprising computer program code which, when executed by a processor, causes the processor to:

• process an input to identify a resonance frequency of a circuit comprising an electrical resonator;
• calculate, based on the resonance frequency, a gate capacitance;
• and
• generate an output identifying the gate capacitance.