Multi racetrack cathodic arc
AssigneeVapor Technologies, Inc.
InventorZachary ZEMBOWER
Life of this patent
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Abstract
An arc deposition system includes a coating chamber and a central cathode target disposed within the coating chamber. At least two anodes surround the central cathode target. Each anode is positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target. At least two magnetic components are located within the central cathode target. The magnetic components guide an associated arc that forms its associated racetrack erosion profile. Characteristically, each anode of the at least two anodes has an associated magnetic component.
Claims21
An arc deposition system comprising:
- a coating chamber;
- a central cathode target disposed within the coating chamber;
- at least two anodes surrounding the central cathode target, each anode being positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target;
- and
- at least two magnetic components located within the central cathode target for guiding an associated arc that forms its associated racetrack erosion profile, each anode of the at least two anodes having an associated magnetic component.
An arc deposition system comprising:
- a coating chamber;
- a central cathode target disposed within the coating chamber;
- a first anode;
- a second anode, the first anode and the second anode surrounding the central cathode target, the first anode being positively biased with respect to the central cathode target such that the first anode induces a first racetrack erosion profile on the central cathode target, the second anode being positively biased with respect to the central cathode target such that the second anode induces a second racetrack erosion profile on the central cathode target;
- a first magnetic component for guiding a first arc that forms the first racetrack erosion profile;
- and
- a second magnetic component for guiding a second arc that forms the second racetrack erosion profile, wherein the first magnetic component and the second magnetic component are located within the central cathode target.
Dependencies are inferred from the claim text.