Apparatus and Method for Milling Sample
AssigneeJEOL Ltd.
InventorMunehiro Kozuka
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Abstract
Provided is a sample milling apparatus capable of milling various samples efficiently. The sample milling apparatus includes an anode, a cathode for emitting electrons which are made to collide with gas molecules so that ions are generated, an extraction electrode for causing the generated ions to be extracted as an ion beam, and a focusing electrode disposed between the cathode and the extraction electrode and applied with a focusing voltage. The spatial profile of the ion beam is controlled by varying the focusing voltage applied to the focusing electrode.
Claims7
A sample milling apparatus for milling a sample by irradiating it with an ion beam, said sample milling apparatus comprising:
- an anode;
- a cathode for emitting electrons which are made to collide with gas molecules so that ions are generated;
- an extraction electrode for causing the generated ions to be extracted as said ion beam;
- and
- a focusing electrode disposed between the cathode and the extraction electrode and applied with a focusing voltage;
- wherein said ion beam has a spatial profile that is controlled by varying the focusing voltage applied to the focusing electrode.
A sample milling method using a sample milling apparatus comprising an anode, a cathode for emitting electrons which are made to collide with gas molecules so that ions are generated, an extraction electrode for causing the generated ions to be extracted as an ion beam, and a focusing electrode disposed between the cathode and the extraction electrode and applied with a focusing voltage, the sample milling apparatus operating to mill a sample by irradiating it with the ion beam having a spatial profile, said sample milling method comprising the step of:
- controlling the spatial profile of the ion beam by varying the focusing voltage applied to the focusing electrode.
Dependencies are inferred from the claim text.