End Effector Of Wafer Transfer Robot With Embedded Sensors
AssigneesMicroprogram Information Co., Ltd., T-Parus Trading Co., Ltd., Sheng Chyuan Technology Co., Ltd.
InventorsTENG YEN WU, CHIA WEI LIU
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Abstract
An end effector, which is connected to a wafer transfer robot, includes a main member, a sensor and a lid. The main member has a first room on a side thereof, in which the sensor is received. The lid is fixed to the main member to cover the sensor. The sensor transmits a vibration signal to a central controller when the main member is vibrating. The end effect may work in a narrow space to transfer wafers and still keep high sensible and precise detection of vibration.
Claims10
An end effector, which is connected to a wafer transfer robot, comprising:
- a main member having a first room on a side thereof;
- a sensor received in the first room to sense vibration of the main member;
- and
- a lid fixed to the main member to cover the sensor;
- whereby the sensor transmits a vibration signal to a central controller when the main member is vibrating.
Dependencies are inferred from the claim text.