Methods and apparatus for diagnosing unobserved operational parameters
AssigneeASML Netherlands B.V.
InventorDavid Evert Song Kook SIGTERMANS
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AssigneeASML Netherlands B.V.
InventorDavid Evert Song Kook SIGTERMANS
Estimating the term…
An apparatus and method of diagnosing an unobserved operational parameter of a machine or apparatus. The method including obtaining a plurality of causal relationships between pairs of parameters of the machine or apparatus, wherein each pair includes a cause parameter and an effect parameter. For at least some of the parameters, a decomposition of the parameters into a plurality of information components is determined, based on the determined causal relationships between the parameters. The decomposition includes a synergistic information component including information obtained from a combination of at least two causal relationships having the parameter as effect parameter. A parameter is determined to include a negative synergistic information component. Based on the existence of the negative synergistic information component, it is diagnosed that an unobserved operational parameter provides a cause for the parameter including the negative synergistic information component.
A method comprising:
A method comprising:
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