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US 2023/0183294 A1Published application
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJieun KIM, Soonchun CHUNG, Jinha KIM, Joonsong PARK
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Abstract
A polypeptide including a region A, a region B, and a region C, a photoresist composition including the polypeptide, and a method of forming patterns by using the photoresist composition.
Claims20
A polypeptide comprising a region A, a region B, and a region C,
- wherein the region A has an alanine content of 20% or more and includes a first repeat unit having 4 to 10 consecutive amino acid residues,
- the region B has a tyrosine content of 10% or more and includes a second repeat unit having 4 to 10 consecutive amino acid residues, and
- the region C has a content, of 50% or more, of at least one of aspartic acid or glutamic acid, and includes a third repeat unit having 2 to 8 consecutive amino acid residues.
Dependencies are inferred from the claim text.