Processing apparatus, and installing method of processing tool of processing apparatus
AssigneeTokyo Electron Limited
InventorsYasutaka MIZOMOTO, Susumu HAYAKAWA
Life of this patent
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Abstract
A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover includes an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof. The processing apparatus further includes a shutter configured to open or close the entrance opening of the exterior cover.
Claims19
A processing apparatus, comprising:
- a holder configured to hold a processing target object;
- a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner;
- and
- an exterior cover accommodating the holder and the processing mechanism therein,
- wherein the exterior cover comprises an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof, and
- the processing apparatus further comprises a shutter configured to open or close the entrance opening of the exterior cover.
An installing method of a processing tool of a processing apparatus equipped with a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism, the installing method comprising:
- instructing, by the processing apparatus, a replacing apparatus to install the processing tool;
- detecting, by the processing apparatus, an arrival of the replacing apparatus at a set position outside the exterior cover;
- and
- opening a shutter, which is configured to open or close an entrance opening of the exterior cover, to allow the replacing apparatus to advance to an inside of the exterior cover from an outside thereof through the entrance opening of the exterior cover.
Dependencies are inferred from the claim text.