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US 2023/0176483 A1Published application
Exposure machine and exposure method
AssigneeChangxin Memory Technologies, Inc.
InventorBin ZOU
Life of this patent
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Abstract
An exposure machine and an exposure method are provided in some embodiments of the present disclosure. The exposure machine includes: a detection module, configured to detect whether there are attachments on the surface of a reticle: a cleaning device, configured to clean the attachments on the surface of the reticle; and an exposure module, configured to expose the reticle having no attachments detected.
Claims12
An exposure machine, comprising:
- a detection module, configured to detect, whether there are attachments on the surface of a reticle;
- a cleaning device, configured to clean the attachments on the surface of the reticle;
- and
- an exposure module, configured to expose the reticle having no attachments detected.
1 more element
Dependencies are inferred from the claim text.