Surface coupling induced ionization technique and its corresponding plasma and plasma devices
AssigneeHigh-dimensional Plasma Sources Technology (Xiaogan) Co., Ltd.
InventorsLinde Zhang, Xiangjun Yan
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AssigneeHigh-dimensional Plasma Sources Technology (Xiaogan) Co., Ltd.
InventorsLinde Zhang, Xiangjun Yan
Estimating the term…
Provided are a surface coupling induced ionization method, and a plasma device. The method includes the following steps: (1) feeding a first electromagnetic wave beam to a material via a free space or waveguide to excite surface plasma waves; where target molecules to be ionized are introduced to a surface of the material, and electrons of the target molecules are coupled with surface plasmons on the material under interaction control to induce the ionization of the target molecules; (2) feeding second and subsequent electromagnetic wave beams to an ionization area of the target molecules on the surface of the material synchronously via the free space or waveguide, such that the ionized target molecules absorb the electromagnetic waves to improve the degree of ionization of the target molecules; and (3) releasing the target molecules in the form of bulk phase plasma to realize surface coupling induced ionization.
A surface coupling induced ionization technique, comprising any of the following steps:
Dependencies are inferred from the claim text.