Based on multiple manufacturing process variations, producing multiple contours representing predicted shapes of an ic design component
AssigneeD2S, Inc.
InventorsDonald Oriordan, Akira Fujimura, George Janac
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Abstract
A method for manufacturing-aware editing of circuit layouts driven by predictions regarding predicted manufactured wafer contours generated by a machine-trained network. The method allows for fast edit loops in interactive editing timeframes, in which the predicted manufactured wafer contours corresponding to design edits are presented within seconds of the edits themselves. In some embodiments, the wafer contours take mask OPC/ILT and lithography effects into account, as determined by the machine trained network.
Claims21
A method for editing an integrated circuit (IC) design layout, the method comprising:
- receiving a design layout produced by a first set of design edit operations, the layout comprising a plurality of components;
- using a machine-trained network to produce a plurality contours for each component that represent a plurality of predicted manufactured shapes of the component, the plurality of contours for each component comprising a first set of one or more contours corresponding to a first predicted shape of the component for a first variation of a manufacturing process parameter and a second set of one or more contours corresponding to a second predicted shape of the component for a second variation of the manufacturing process parameter, the manufacturing process parameter associated with a manufacturing process that will be used to manufacture an IC from the design layout;
- using the pluralities of contoured shapes to perform a second set of design edit operations.
A non-transitory machine readable medium comprising a program that when executed by at least one processing unit of a computer, edits an integrated circuit (IC) design layout, the program comprising sets of instructions for:
- receiving a design layout produced by a first set of design edit operations, the layout comprising a plurality of components;
- using a machine-trained network to produce a plurality contours for each component that represent a plurality of predicted manufactured shapes of the component, the plurality of contours for each component comprising a first set of one or more contours corresponding to a first predicted shape of the component for a first variation of a manufacturing process parameter and a second set of one or more contours corresponding to a second predicted shape of the component for a second variation of the manufacturing process parameter, the manufacturing process parameter associated with a manufacturing process that will be used to manufacture an IC from the design layout;
- using the pluralities of contoured shapes to perform a second set of design edit operations.
Dependencies are inferred from the claim text.